{"id":400,"date":"2021-03-19T08:12:10","date_gmt":"2021-03-19T08:12:10","guid":{"rendered":"https:\/\/vinuni.edu.vn\/research\/?p=400"},"modified":"2022-09-05T08:12:29","modified_gmt":"2022-09-05T08:12:29","slug":"vacuum-packaged-low-power-resonant-mems-strain-sensor","status":"publish","type":"post","link":"https:\/\/vinuni.edu.vn\/research\/vacuum-packaged-low-power-resonant-mems-strain-sensor\/","title":{"rendered":"Vacuum Packaged Low-Power Resonant MEMS Strain Sensor"},"content":{"rendered":"<p>Abstract<\/p>\n<p>This paper describes a technical approach toward the realization of a low-power temperature- ompensated micromachined resonant strain sensor. The sensor design is based on two identical and orthogonally-oriented resonators where the differential frequency is utilized to provide an output proportional to the applied strain with temperature compensation achieved to first order. Interface circuits comprising of two front-end oscillators, a mixer, and low-pass filter are designed and fabricated in a standard 0.35-\u03bcm CMOS process. The characterized devices demonstrate a scale factor of 2.8 Hz\/\u03bc\u03b5 over a strain range of 1000 \u03bc\u03b5 with excellent linearity over the measurement range. The compensated frequency drift due to temperature is reduced to 4% of the uncompensated value through this scheme. The total continuous power consumption of the strain sensor is 3 \u03bcW from a 1.2 V supply. This low power implementation is essential to enable battery-powered or energy harvesting enabled monitoring applications<\/p>\n<p>Author: Cuong Do and co-authors<\/p>\n<p>Read more about the article\u00a0<a href=\"https:\/\/ieeexplore.ieee.org\/abstract\/document\/7517298\/\">here<\/a><\/p>\n<p>Read more about the author\u00a0<a href=\"https:\/\/vinuni.edu.vn\/people\/do-danh-cuong\/\">here<\/a><\/p>\n","protected":false},"excerpt":{"rendered":"<p>Abstract This paper describes a technical approach toward the realization of a low-power temperature- ompensated micromachined resonant strain sensor. The sensor design is based on two identical and orthogonally-oriented resonators where the differential frequency is utilized to provide an output proportional to the applied strain with temperature compensation achieved to first order. Interface circuits comprising [&hellip;]<\/p>\n","protected":false},"author":2,"featured_media":401,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":[],"categories":[3],"tags":[37],"acf":[],"yoast_head":"<!-- This site is optimized with the Yoast SEO plugin v19.6.1 - https:\/\/yoast.com\/wordpress\/plugins\/seo\/ -->\n<title>Vacuum Packaged Low-Power Resonant MEMS Strain Sensor - Vinuni Research Website<\/title>\n<meta name=\"robots\" content=\"index, follow, max-snippet:-1, max-image-preview:large, max-video-preview:-1\" \/>\n<link rel=\"canonical\" href=\"https:\/\/vinuni.edu.vn\/research\/vacuum-packaged-low-power-resonant-mems-strain-sensor\/\" \/>\n<meta property=\"og:locale\" content=\"en_US\" \/>\n<meta property=\"og:type\" content=\"article\" \/>\n<meta property=\"og:title\" content=\"Vacuum Packaged Low-Power Resonant MEMS Strain Sensor - Vinuni Research Website\" \/>\n<meta property=\"og:description\" content=\"Abstract This paper describes a technical approach toward the realization of a low-power temperature- ompensated micromachined resonant strain sensor. The sensor design is based on two identical and orthogonally-oriented resonators where the differential frequency is utilized to provide an output proportional to the applied strain with temperature compensation achieved to first order. Interface circuits comprising [&hellip;]\" \/>\n<meta property=\"og:url\" content=\"https:\/\/vinuni.edu.vn\/research\/vacuum-packaged-low-power-resonant-mems-strain-sensor\/\" \/>\n<meta property=\"og:site_name\" content=\"Vinuni Research Website\" \/>\n<meta property=\"article:published_time\" content=\"2021-03-19T08:12:10+00:00\" \/>\n<meta property=\"article:modified_time\" content=\"2022-09-05T08:12:29+00:00\" \/>\n<meta property=\"og:image\" content=\"https:\/\/vinuni.edu.vn\/research\/wp-content\/uploads\/2022\/09\/Prof.-Cuong-e1616129895336.png\" \/>\n\t<meta property=\"og:image:width\" content=\"489\" \/>\n\t<meta property=\"og:image:height\" content=\"305\" \/>\n\t<meta property=\"og:image:type\" content=\"image\/png\" \/>\n<meta name=\"author\" content=\"phuong.ntn\" \/>\n<meta name=\"twitter:card\" content=\"summary_large_image\" \/>\n<meta name=\"twitter:label1\" content=\"Written by\" \/>\n\t<meta name=\"twitter:data1\" content=\"phuong.ntn\" \/>\n\t<meta name=\"twitter:label2\" content=\"Est. reading time\" \/>\n\t<meta name=\"twitter:data2\" content=\"1 minute\" \/>\n<script type=\"application\/ld+json\" class=\"yoast-schema-graph\">{\"@context\":\"https:\/\/schema.org\",\"@graph\":[{\"@type\":\"WebPage\",\"@id\":\"https:\/\/vinuni.edu.vn\/research\/vacuum-packaged-low-power-resonant-mems-strain-sensor\/\",\"url\":\"https:\/\/vinuni.edu.vn\/research\/vacuum-packaged-low-power-resonant-mems-strain-sensor\/\",\"name\":\"Vacuum Packaged Low-Power Resonant MEMS Strain Sensor - Vinuni Research Website\",\"isPartOf\":{\"@id\":\"https:\/\/vinuni.edu.vn\/research\/#website\"},\"datePublished\":\"2021-03-19T08:12:10+00:00\",\"dateModified\":\"2022-09-05T08:12:29+00:00\",\"author\":{\"@id\":\"https:\/\/vinuni.edu.vn\/research\/#\/schema\/person\/d19200a9f0488a2d6374d8641ee8c085\"},\"breadcrumb\":{\"@id\":\"https:\/\/vinuni.edu.vn\/research\/vacuum-packaged-low-power-resonant-mems-strain-sensor\/#breadcrumb\"},\"inLanguage\":\"en-US\",\"potentialAction\":[{\"@type\":\"ReadAction\",\"target\":[\"https:\/\/vinuni.edu.vn\/research\/vacuum-packaged-low-power-resonant-mems-strain-sensor\/\"]}]},{\"@type\":\"BreadcrumbList\",\"@id\":\"https:\/\/vinuni.edu.vn\/research\/vacuum-packaged-low-power-resonant-mems-strain-sensor\/#breadcrumb\",\"itemListElement\":[{\"@type\":\"ListItem\",\"position\":1,\"name\":\"Vacuum Packaged Low-Power Resonant MEMS Strain Sensor\"}]},{\"@type\":\"WebSite\",\"@id\":\"https:\/\/vinuni.edu.vn\/research\/#website\",\"url\":\"https:\/\/vinuni.edu.vn\/research\/\",\"name\":\"Vinuni Research Website\",\"description\":\"\",\"potentialAction\":[{\"@type\":\"SearchAction\",\"target\":{\"@type\":\"EntryPoint\",\"urlTemplate\":\"https:\/\/vinuni.edu.vn\/research\/?s={search_term_string}\"},\"query-input\":\"required name=search_term_string\"}],\"inLanguage\":\"en-US\"},{\"@type\":\"Person\",\"@id\":\"https:\/\/vinuni.edu.vn\/research\/#\/schema\/person\/d19200a9f0488a2d6374d8641ee8c085\",\"name\":\"phuong.ntn\",\"image\":{\"@type\":\"ImageObject\",\"inLanguage\":\"en-US\",\"@id\":\"https:\/\/vinuni.edu.vn\/research\/#\/schema\/person\/image\/\",\"url\":\"https:\/\/secure.gravatar.com\/avatar\/678312306781d0830679d2c1a8a112f1?s=96&d=mm&r=g\",\"contentUrl\":\"https:\/\/secure.gravatar.com\/avatar\/678312306781d0830679d2c1a8a112f1?s=96&d=mm&r=g\",\"caption\":\"phuong.ntn\"}}]}<\/script>\n<!-- \/ Yoast SEO plugin. -->","yoast_head_json":{"title":"Vacuum Packaged Low-Power Resonant MEMS Strain Sensor - Vinuni Research Website","robots":{"index":"index","follow":"follow","max-snippet":"max-snippet:-1","max-image-preview":"max-image-preview:large","max-video-preview":"max-video-preview:-1"},"canonical":"https:\/\/vinuni.edu.vn\/research\/vacuum-packaged-low-power-resonant-mems-strain-sensor\/","og_locale":"en_US","og_type":"article","og_title":"Vacuum Packaged Low-Power Resonant MEMS Strain Sensor - Vinuni Research Website","og_description":"Abstract This paper describes a technical approach toward the realization of a low-power temperature- ompensated micromachined resonant strain sensor. The sensor design is based on two identical and orthogonally-oriented resonators where the differential frequency is utilized to provide an output proportional to the applied strain with temperature compensation achieved to first order. 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